Tsinghua University research results MEMS vibration sensor samples passed the test

[ China Instrument Network Instrument Development ] MEMS sensor is a sensor that integrates electromechanical sensitive components and processing circuits based on various physical effects on one chip by using integrated circuit technology and micromachining. The advantages of small size, light weight, low power consumption, high sensitivity, high reliability, easy integration and resistance to harsh working environment have promoted the development of sensors in the direction of miniaturization, intelligence, multi-functionality and networking.

MEMS vibration sensors can be used for vibration and displacement in machinery, long-term monitoring of thermal expansion of rotors and casings; on-line automatic detection and automatic control of production lines; measurement of various small distances and small movements in scientific research. MEMS vibration sensors have been widely used in energy, chemical, medical, automotive, metallurgy, machine manufacturing, military, scientific research and teaching and many other fields.

As a key component for acquiring information, MEMS vibration sensors have greatly promoted the miniaturization of various sensing devices. With the rapid development of MEMS technology, MEMS sensors have received extensive attention from various developed countries. MEMS sensor technology has been regarded as one of the strategic research fields, and relevant plans have been formulated and invested heavily in special research.

Recently, the National Optoelectronics Center successfully completed the research work of Tsinghua University's scientific research results - MEMS vibration sensor samples.

The MEMS vibration sensor is not only the scientific research achievement of the national high-tech research and development plan (863 plan) for the multi-functional micro-nano sensor for manufacturing equipment testing, but also the development result of Wuhan Boiler Co., Ltd. for monitoring the vibration environment in the boiler under ultra-high temperature conditions. .

The acceptance of scientific research results is the key to scientific research and innovation, and inspection and testing is the main means of acceptance of scientific research results. MEMS vibration sensors are scientific research results, and there are no relevant test standards in China. According to the acceptance requirements of the project, the National Optoelectronics Center and the project researchers fully communicated and communicated with the national similar category equipment standards, and the test results showed that the sensor has reached the design goal, highlighting the basic supporting role of inspection and testing for scientific and technological innovation. .

As an important symbolic industry of international competition strategy, MEMS sensor has attracted the attention of all countries in the world due to its high technical content and broad market prospects. In the past ten years, China's MEMS sensor industry ecosystem has been gradually improved. From research and development, design, foundry, packaging and testing to application, the complete industrial chain has basically formed, and the state has also given unprecedented policy support to the MEMS sensor industry.

The development of China's MEMS industry is facing major opportunities, especially the rapid development of mobile Internet and Internet of Things, which will have a profound impact on the MEMS industry, and will spawn a large number of new products and applications, driving MEMS products in daily life and industry. Popularization in production.

(Source: Sensor Expert Network, Electronic Enthusiasts Network, Hubei Provincial Bureau of Quality and Technical Supervision)