[China Instrument Network Instrument R&D] From March 25th to 31st, the AQSIQ organized the project acceptance meeting at the China Institute of Metrology (hereinafter referred to as “China Metrology Instituteâ€), respectively, to the National Science and Technology Support Program project The nine sub-topics under the "Technical measurement standards and standard substance studies" are accepted. On the 25th, the project undertaken by the China Metrology Institute and coordinated by the Tianjin University on the subject of “Key Technology Research on the Establishment and Traceability of Micrograms and Micro Forces of Micrograms†was qualified by experts and passed acceptance.
The picture shows the acceptance meeting
At the project acceptance meeting, experts from 11 institutions including the Beijing Great Wall Metrology and Measurement Technology Research Institute, the China Institute of Information and Communication Technology, Tsinghua University, and Nankai University heard the report of the research group, reviewed the acceptance materials, and passed the inquiry and discussion. It is believed that: the project successfully developed 500μg, 200μg, 100μg, and 50μg mass measurement standards and automatic measurement systems, and a micronano force value standard device with a force range (10-8 to 10-4) N, which fills the quality and microcosm of China's micrograms. The standard measurement capability of Nano Force was blank, and a traceability system for microgram mass and micro-nano force values ​​was constructed.
For international trade, quality measurement plays a decisive role. The demand for exploring the microscopic world in the fields of new materials, micro-nano processing, and biomedicine is challenging the accuracy and limit of quality and force measurement. According to the project leader Hu Gang, an associate researcher at China Institute of Metrology, in the field of biomedicine, when preparing high-performance liquid chromatographic solutions, the quality of certain standards used is on the order of milligrams or even micrograms, and the standard used to weigh the standard The balance needs the microgram quality standard to guarantee the accuracy and reliability of its measurement. In the field of microelectronics, the constitutive relations of micro-electromechanical systems (MEMS) devices and packaging materials, thermal expansion coefficient, Young's modulus, and other mechanical mechanics and physical properties, etc., also urgently require accurate traceability of micro-nano force values.
In order to reproduce and transmit micrograms and micro-nano-force values, and establish measurement capabilities that can be traced back to SI units, China Institute of Metrology and Tianjin University jointly carried out research on the measurement standards for microgram quality and micro/nano-force values. The research group lasted for 4 years and successfully developed 2 sets of microgram quality standards, 1 set of microgram quality measurement system, and 2 sets of micronano force standard equipment. The overall integrated technical indicators and performance have reached the international advanced level and achieved measurement values ​​to the country. Traceability of quality, electrical, and length benchmarks.
Among them, the established microgram quality measurement standard (one) has an extended measurement uncertainty of better than 0.094 μg (k=2) at the 50 μg mass point. This is equivalent to replicating one-thousandth of the mass of a drop of water (0.05g), and the expanded uncertainty does not exceed one-fifth of the quality of the drop. With the micro-nano force standard device using mass method, the force value resolution can reach 1nN, and the relative standard uncertainty in the (1~10)μN range does not exceed 0.4%. “Not only sensitive but also accurate,†Hu Gang explained. “This puts high demands on the measurement method. We must analyze and reduce the impact of measuring mechanism deformation and environmental factors on the measurement results,†he said. The independently designed flexible hinge mechanism and differential measurement system scheme not only ensure the high sensitivity of the system, but also improve the measurement accuracy.
The picture shows the acceptance meeting
At the project acceptance meeting, experts from 11 institutions including the Beijing Great Wall Metrology and Measurement Technology Research Institute, the China Institute of Information and Communication Technology, Tsinghua University, and Nankai University heard the report of the research group, reviewed the acceptance materials, and passed the inquiry and discussion. It is believed that: the project successfully developed 500μg, 200μg, 100μg, and 50μg mass measurement standards and automatic measurement systems, and a micronano force value standard device with a force range (10-8 to 10-4) N, which fills the quality and microcosm of China's micrograms. The standard measurement capability of Nano Force was blank, and a traceability system for microgram mass and micro-nano force values ​​was constructed.
For international trade, quality measurement plays a decisive role. The demand for exploring the microscopic world in the fields of new materials, micro-nano processing, and biomedicine is challenging the accuracy and limit of quality and force measurement. According to the project leader Hu Gang, an associate researcher at China Institute of Metrology, in the field of biomedicine, when preparing high-performance liquid chromatographic solutions, the quality of certain standards used is on the order of milligrams or even micrograms, and the standard used to weigh the standard The balance needs the microgram quality standard to guarantee the accuracy and reliability of its measurement. In the field of microelectronics, the constitutive relations of micro-electromechanical systems (MEMS) devices and packaging materials, thermal expansion coefficient, Young's modulus, and other mechanical mechanics and physical properties, etc., also urgently require accurate traceability of micro-nano force values.
In order to reproduce and transmit micrograms and micro-nano-force values, and establish measurement capabilities that can be traced back to SI units, China Institute of Metrology and Tianjin University jointly carried out research on the measurement standards for microgram quality and micro/nano-force values. The research group lasted for 4 years and successfully developed 2 sets of microgram quality standards, 1 set of microgram quality measurement system, and 2 sets of micronano force standard equipment. The overall integrated technical indicators and performance have reached the international advanced level and achieved measurement values ​​to the country. Traceability of quality, electrical, and length benchmarks.
Among them, the established microgram quality measurement standard (one) has an extended measurement uncertainty of better than 0.094 μg (k=2) at the 50 μg mass point. This is equivalent to replicating one-thousandth of the mass of a drop of water (0.05g), and the expanded uncertainty does not exceed one-fifth of the quality of the drop. With the micro-nano force standard device using mass method, the force value resolution can reach 1nN, and the relative standard uncertainty in the (1~10)μN range does not exceed 0.4%. “Not only sensitive but also accurate,†Hu Gang explained. “This puts high demands on the measurement method. We must analyze and reduce the impact of measuring mechanism deformation and environmental factors on the measurement results,†he said. The independently designed flexible hinge mechanism and differential measurement system scheme not only ensure the high sensitivity of the system, but also improve the measurement accuracy.